Tescan MIRA XR UHR SEM-EDS for Materials Science: Reproducible, Reliable Imaging and Analysis

Tescan MIRA XR is built for modern materials science, combining reproducible ultra-high-resolution imaging with rapid, precise EDS analysis. It streamlines workflows in research and quality control, reducing dependency on operator expertise while ensuring consistent results.

BrightBeam™ technology for nanometer-scale detail

In-Flight Beam Tracing™ for optimized, repeatable imaging

Wide Field Optics™ for effortless navigation across scales

Dual Essence™ EDS for fast, accurate chemicalanalysis

MultiVac mode for reliable imaging of challenging samples

VisualCoder automation to cut operator workload by up to 80%

Main Benefits of TESCAN MIRA XR

for Materials Science Workflows

Reproducible High-Resolution Imaging

BrightBeam™ technology ensures nanometer-scale resolution with consistent, repeatable imaging across diverse materials.

Fast, Accurate Chemical Analysis

Dual Essence™ EDS enables rapid multi-element mapping with reduced shading, doubling throughput for compositional studies.

Effortless Navigation Across Scales

Wide Field Optics™ and In-Flight Beam TracingTM allows smooth transitions from millimeter-scale overviews to nanoscale details, cutting time-to-data by up to 30% and providing best imaging conditions for each analysis.

Confident Imaging of Challenging Samples

MultiVac low-vacuum mode supports reliable imaging of charging, , or beam-sensitive materials without surface coating.

Automation for Every User

VisualCoder workflow builders allow anyone to create automated routines that reduce operator workload by up to 80%, making SEM operation accessible and repeatable for all users.

Crystallography Workflows

Optional large-area EBSD mapping provides crystallographic data from regions larger than 5 millimeters down to the nanoscale.

Software Overview

Essence™ Interface for MIRA XR

Essence™ is the central control environment for MIRA XR, integrating imaging, navigation, and analysis tools.

Customizable multi-user interface with task-focused layouts
Live 3D collision model for safe stage movements
Automated beam alignment and autofocus routines
Integrated workflows for imaging and analytical techniques

VisualCoder Workflow Automation

Drag-and-drop workflow builder that allows users to automate repetitive imaging and analytical tasks. Reduces operator workload by up to 80% and guarantees consistent data quality in multi-user environments.

SEM Expert PI

Advanced programming interface that enables labs to design and deploy custom SEM workflows. Ideal for specialized research or high-throughput analytical routines requiring tailored automation.

Essence™ 3D Collision Model

Live chamber visualization with collision protection. Provides real-time positioning feedback, safeguarding detectors and samples during complex stage movements and multi-detector configurations.

Imaging and EDS Routines

Integrated autofocus, beam alignment, and EDS acquisition with Dual Essence™ detectors. Accelerates analytical workflow and ensures shading-free data collection for precise material characterization.

All modules are seamlessly integrated into the Essence™ software environment, delivering consistent, efficient, and reproducible results across a wide range of materials science workflows.

Unlocked content

Why Choose TESCAN MIRA XR

for Materials Science?

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TESCAN MIRA XR for Materials Science

Technical specification

TESCAN MIRA XR® UHR SEM-EDS for Materials Science Specifications shown are based on the GM chamber configuration.	Ultra-high resolution BrightBeam™ FE-SEM column
	Resolution: • 0.8 nm @ 30 keV (STEM detector) • 1.0 nm @ 15 keV • 1.5 nm @ 1 keV • 1.4 nm with sample bias (BDT) • 1.7 nm @ 500 eV
	Magnification range from 1× to 2,000,000×
	Essence™ integration for SEM and EDS in one interface
	Elemental mapping, line scans, and point analysis included
	Wide Field Optics™ for SEM navigation from 1×
	Essence™ 3D Collision Model for chamber visualization and protection
	MultiVac low vacuum imaging up to 500 Pa
	5-axis motorized stage with max sample size of 335 × 280 × 133 mm³ and load capacity up to 8 kg
	20+ chamber ports ready for detector upgrades
Included & Optional Accessories	Dual Essence™ EDS detectors for high-speed mapping
	In-Column Axial detector for high-efficiency ultra-high resolution imaging
	EBSD detector for crystallographic analysis from large maps to nanoscale
	STEM detector for transmission imaging at sub-nanometer resolution
	VisualCoder™ and SEM Expert PI for workflow automation and customization
	VisualCoder for workflow automation and SEM Expert PI for advanced automation and scripting

TESCAN MIRA XR® UHR SEM-EDS for Materials Science Specifications shown are based on the GM chamber configuration.

Ultra-high resolution BrightBeam™ FE-SEM column

Resolution:
• 0.8 nm @ 30 keV (STEM detector)
• 1.0 nm @ 15 keV
• 1.5 nm @ 1 keV
• 1.4 nm with sample bias (BDT)
• 1.7 nm @ 500 eV

Magnification range from 1× to 2,000,000×

Essence™ integration for SEM and EDS in one interface

Elemental mapping, line scans, and point analysis included

Wide Field Optics™ for SEM navigation from 1×

Essence™ 3D Collision Model for chamber visualization and protection

MultiVac low vacuum imaging up to 500 Pa

5-axis motorized stage with max sample size of 335 × 280 × 133 mm³ and load capacity up to 8 kg

20+ chamber ports ready for detector upgrades

Included & Optional Accessories

Dual Essence™ EDS detectors for high-speed mapping

In-Column Axial detector for high-efficiency ultra-high resolution imaging

EBSD detector for crystallographic analysis from large maps to nanoscale

STEM detector for transmission imaging at sub-nanometer resolution

VisualCoder™ and SEM Expert PI for workflow automation and customization

VisualCoder for workflow automation and SEM Expert PI for advanced automation and scripting

GET IN Touch

Where can you find us:

Tescan
Libušina třída 21
623 00 Brno
Czech Republic

130405923 us US 37.09024 -95.712891 25.3575 29.349345 20.67957527 42.082797 39.91384763 -33.693421 13.93320106 3.039986586 31.997988 38.050985 47.579533 48.1485965 58.375799 54.663142 19.195447 56.975106 50.493053 45.868592 10.79556993 44.35660598 43.2371604 55.536415 14.557577179752773 32.100937 -6.116829 -6.212299277967318 23.7104 -33.471062 31.998740087 -23.69149395 43.462349 51.529848 49.1893523 49.197486 25.072375 31.075811 1.299027 40.676979 52.30150662 51.013813 35.684121 37.479653 52.246622 40.581349 39.911632 -26.1811371 41.818215 33.429928 -12.08688

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