Capture High-Quality 4D-STEM Datasets in a Single Scan Using Tescan TENSOR

Tescan TENSOR delivers precise strain mapping, phase orientation, and high-throughput compositional analysis in one integrated analytical STEM platform, with precession-assisted 4D-STEM for advanced semiconductor device characterization.

With sub-2 nm resolution of precession-assisted 4D-STEM, automated beam alignments, and real-time visualization of processed 4D-STEM data, TENSOR ensures clarity, speed, and reproducibility of analytical measurements, from quantitative 2D strain analysis to phase analysis and grain mapping in polycrystalline thin films.

4D-STEM, precession diffraction, and EDS in one scan

Real-time mapping with Explore™ visualization

Automated alignment and tilt-to-zone functions

Near-UHV conditions for sample protection

High throughput due to fast beam precession (72 kHz), hybrid-pixel diffraction detector (Dectris Quadro), and two large EDX sensors with 2.0 sr total collection solid angle

Main Benefits of Tescan TENSOR for Material Science

Accelerate 4D-STEM Data Acquisition

Capture diffraction and EDS datasets in minutes with high-speed beam precession and Dectris Quadro detection.

Resolve Sub-2 nm Strain Mapping

Analyze fine structural details in FinFET and nanosheet gates-all-around transistors for precise strain engineering and defect identification.

Quantify different phases in polymorphic thin films

Assess different phases in process development of ferroelectric transistors and other functional polycrystalline thin films.

Automate Beam Alignments and Tilting to a Zone-Axis

Remove manual setup steps with fully automated alignment and intuitive tilt-to-zone-axis functions for consistent, reproducible results.

Protect Samples with Near-UHV Conditions

Maintain sample integrity and prevent contamination during extended analysis for cleaner imaging and accurate measurements.

Integrate STEM, EDS, and Precession Diffraction

Combine structural, chemical, and phase analyses in a single platform for efficient multimodal characterization.

Visualize Results in Real Time with Explore™

View processed diffraction and elemental maps already during acquisition for immediate insights and faster decision-making.

Why Choose Tescan TENSOR

for Material Science?

Phase Mapping in Battery and Energy Materials

Differentiate grains and phases in electrodes and track material changes across charge cycles. TENSOR advances crystallographic and chemical composition insights in the field of energy research.

Crystallography and Chemistry in Nanomaterials

Beam precession improves clarity for orientation and phase mapping at the nanoscale. Simultaneous EDS and diffraction data acquisition from the same region facilitates accurate analysis of otherwise challenging phases.

Strain Mapping in Semiconductors

Automate nanobeam diffraction and tilt-to-zone alignments for reliable strain analysis in advanced devices due to fast and accurate beam precession.

Atomic-Scale Imaging of Interfaces and Catalysts

Visualize larger crystal lattices and defects, while stability and beam alignment automation let you focus on sample analysis and data interpretation instead of EM optics tuning.

3D Diffraction for Crystal Structure Determination

Combine 3D tomography, precession electron diffraction, and 4D-STEM to solve structures from nanocrystals and even mixed-phase polycrystalline materials.

Encapsulated Particles and Hybrid Materials

Analyze internal structure and composition of nanoparticles inside composite hosts. STEM, 4D-STEM, and EDS deliver a complete picture from process development and optimization.

Software Overview

Explore™

The central interface for STEM imaging, EDScompositional analysis and mapping, precession electron diffraction, and 4D-STEMworkflows. Process acquired data on-the-fly and visualize results live duringthe microscope session. Reduce time from scan to insight with real-timeoverlays, pattern recognition, and mapping tools.

“TENSOR makesadvanced STEM feel approachable. Explore™ gives us real-time data we used towait hours for, and our team is up and running in days, not months.”

Dr. A. Brown,
Materials Scientist,
University of Leeds

Unlocked content

Output Examples

Get the most out of Tescan

This is more than information; it's an advantage. We've compiled our technical whitepapers, detailed product flyers, and on-demand webinars to provide you with the knowledge that makes a real difference. Sign up now to access the insights you need to make an impact.

TESCAN Tensor for Materials Science

Technical specification

Tescan TENSOR	Accelerating Voltage: 100 kV (optimized for high scattering contrast and dose-limited resolution)
	STEM Resolution: 2.8 Å
	Beam Precession Frequency: 72,000 Hz
	Diffraction Detector: Direct Electron (DED), - maximum frame rate 4,500 fps - dynamic range ~10⁷
	EDS System: Dual windowless detectors with 2.0 sr solid angle
	Vacuum System: Near-UHV vacuum in sample area (<10⁻⁶ Pa)
	Beam Blanking: Integrated electrostatic beam blanker - up to 1 MHz rate of blanking
	Precession Angle Range: 0.1° to 3.0°
	Automation Features: Beam alignments, Tilt to the zone axis, Measurement presets

Tescan TENSOR

Accelerating Voltage: 100 kV
(optimized for high scattering contrast and dose-limited resolution)

STEM Resolution: 2.8 Å

Beam Precession Frequency: 72,000 Hz

Diffraction Detector: Direct Electron (DED),
- maximum frame rate 4,500 fps
- dynamic range ~10⁷

EDS System: Dual windowless detectors with 2.0 sr solid angle

Vacuum System: Near-UHV vacuum in sample area (<10⁻⁶ Pa)

Beam Blanking: Integrated electrostatic beam blanker
- up to 1 MHz rate of blanking

Precession Angle Range: 0.1° to 3.0°

Automation Features: Beam alignments, Tilt to the zone axis, Measurement presets

GET IN Touch

Where can you find us:

Tescan
Libušina třída 21
623 00 Brno
Czech Republic

130405923 us US 37.09024 -95.712891 25.3575 29.349345 20.67957527 42.082797 39.91384763 -33.693421 13.93320106 3.039986586 31.997988 38.050985 47.579533 48.1485965 58.375799 54.663142 19.195447 56.975106 50.493053 45.868592 10.79556993 44.35660598 43.2371604 55.536415 14.557577179752773 32.100937 -6.116829 -6.212299277967318 23.7104 -33.471062 31.998740087 -23.69149395 43.462349 51.529848 49.1893523 49.197486 25.072375 31.075811 1.299027 40.676979 52.30150662 51.013813 35.684121 37.479653 52.246622 40.581349 39.911632 -26.1811371 41.818215 33.429928 -12.08688

No distributors found.